Design of a long stroke translation stage for AFM

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A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of a translation stage with a stroke of 1×1×1 mm and a custom-designed AFM measurement head. Here the design of the translation stage, consisting of elastic straight guides, Lorentz-actuators with weight and stiffness compensation and interferometric translation measurement systems, will be discussed. Some preliminary results on the performance of the actuation system are presented.
Originele taal-2Engels
Pagina's (van-tot)183-190
TijdschriftInternational journal of machine tools and manufacture
Volume50
Nummer van het tijdschrift2
DOI's
StatusGepubliceerd - 2010

Vingerafdruk

Actuators
Stiffness
Compensation and Redress

Citeer dit

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abstract = "A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of a translation stage with a stroke of 1×1×1 mm and a custom-designed AFM measurement head. Here the design of the translation stage, consisting of elastic straight guides, Lorentz-actuators with weight and stiffness compensation and interferometric translation measurement systems, will be discussed. Some preliminary results on the performance of the actuation system are presented.",
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Design of a long stroke translation stage for AFM. / Werner, C.; Rosielle, P.C.J.N.; Steinbuch, M.

In: International journal of machine tools and manufacture, Vol. 50, Nr. 2, 2010, blz. 183-190.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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