Design of a data-driven method to predict error-code triggers in the EUV Source Laser

Navoneel Chakrabarty

Onderzoeksoutput: Scriptie › EngD Thesis

Originele taal-2	Engels
Begeleider(s)/adviseur	Muntean, Tiberiu, Begeleider Calzada Morales, Sophia, Externe begeleider, Externe Persoon Gebresilassie, Abel, Externe begeleider Fursich, Katrin, Externe begeleider, Externe Persoon
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Status	Gepubliceerd - 1 sep. 2024

EngD thesis. - Permanently confidential.

Citeer dit

@phdthesis{c9c00e64a05e4838a95befa136cd07bd,

title = "Design of a data-driven method to predict error-code triggers in the EUV Source Laser",

author = "Navoneel Chakrabarty",

note = "EngD thesis. - Permanently confidential.",

year = "2024",

month = sep,

day = "1",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}