Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services

I.M. Mintchev

Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services

I.M. Mintchev

Onderzoeksoutput: Scriptie › EngD Thesis

Originele taal-2	Engels
Begeleider(s)/adviseur	Wijs, Anton J., Begeleider Dajsuren, Yanja, Begeleider
Datum van toekenning	24 okt. 2018
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Status	Gepubliceerd - 24 okt. 2018

Bibliografische nota

PDEng thesis. - Confidential for ever.

Citeer dit

@phdthesis{3348088f463445d6b122d166cd9b9aa3,

title = "Design and development of model-driven software for vertical stage alignment of the ASML TWINSCAN machine : with focus on Algorithms and domain data services",

author = "I.M. Mintchev",

note = "PDEng thesis. - Confidential for ever.",

year = "2018",

month = oct,

day = "24",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}