@inproceedings{2f280ddb2076430a88f6f28588b549ab,
title = "Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle",
author = "{Graaf, de}, A. and {van Deurzen}, P.D.J. and {Sanden, van de}, M.C.M. and D.C. Schram and E. Aldea and G. Dinescu",
year = "1999",
language = "English",
pages = "168--",
booktitle = "IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book",
note = "conference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 ; Conference date: 01-01-1999",
}