Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzle

A. Graaf, de, P.D.J. van Deurzen, M.C.M. Sanden, van de, D.C. Schram, E. Aldea, G. Dinescu

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

Originele taal-2Engels
TitelIVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 : abstract book
Pagina's168-
StatusGepubliceerd - 1999
Evenementconference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998 -
Duur: 1 jan 1999 → …

Congres

Congresconference; IVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998
Periode1/01/99 → …
AnderIVC : 14th International Vacuum Congress, Birmingham, UK, 31 August - 4 September, 1998

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