A procedure to etch deep photonic crystal holes in InGaAsP and subsequently fill them with a low index material such as liq. crystal or a solid polymer has been developed. Successful infiltration was proven by optical transmission measurement and in the case of solid polymer also by cross section inspection.
|Naam||AIP Conference Proceedings|
|ISSN van geprinte versie||0094-243X|
|Congres||conference; ICPS 2006, Vienna, Austria; 2006-07-24; 2006-07-28|
|Periode||24/07/06 → 28/07/06|
|Ander||ICPS 2006, Vienna, Austria|