Data-based feed-forward control in MIMO motion systems

Mark Baggen; Marcel Heertjes; Ramidin Kamidi

doi:10.1109/ACC.2008.4586954

Data-based feed-forward control in MIMO motion systems

Mark Baggen
, Marcel Heertjes
, Ramidin Kamidi

Dynamics and Control

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

37 Citaten (Scopus)

1 Downloads (Pure)

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For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.

Originele taal-2	Engels
Titel	2008 American Control Conference, ACC
Uitgeverij	American Automatic Control Council (AACC)
Pagina's	3011-3016
Aantal pagina's	6
ISBN van geprinte versie	9781424420797
DOI's	https://doi.org/10.1109/ACC.2008.4586954
Status	Gepubliceerd - 30 sep. 2008
Evenement	2008 American Control Conference (ACC 2008) - Westin Seattle Hotel, Seattle, WA, Verenigde Staten van Amerika Duur: 11 jun. 2008 → 13 jun. 2008 http://acc2008.a2c2.org/

Congres

Congres	2008 American Control Conference (ACC 2008)
Verkorte titel	ACC 2008
Land/Regio	Verenigde Staten van Amerika
Stad	Seattle, WA
Periode	11/06/08 → 13/06/08
Ander	2008 American Control Conference
Internet adres	http://acc2008.a2c2.org/

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title = "Data-based feed-forward control in MIMO motion systems",

abstract = "For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.",

keywords = "Data-based control, Finite impulse response modelling, Gauss-newton optimization, Wafer scanners",

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AU - Kamidi, Ramidin

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N2 - For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.

AB - For MIMO motion systems, a data-based feedforward control is derived and implemented on a wafer stage of a wafer scanner. On the basis of a quadratic objective function related to a performance-relevant time-frame of the servo error signals, the coefficients of a set of finite impulse response (FIR) filters are optimized using a Gauss-Newton method. Applied to the wafer stage both the optimization algorithm and the FIR filter structure provide the means to significantly improve upon scanning performance. This includes improved settling behavior, the reduced effect of cross talk by MIMO feedforward forces, and the generalizing properties of these forces at set-points other than for which is optimized.

KW - Data-based control

KW - Finite impulse response modelling

KW - Gauss-newton optimization

KW - Wafer scanners

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BT - 2008 American Control Conference, ACC

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ER -

Data-based feed-forward control in MIMO motion systems

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