Cycle time distributions of semiconductor workstations using aggregate modeling

C.P.L. Veeger; L.F.P. Etman; J.E. Rooda; J. van Herk

doi:10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling

C.P.L. Veeger, L.F.P. Etman, J.E. Rooda, J. van Herk

Mechanical Engineering

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

4 Citaten (Scopus)

2 Downloads (Pure)

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Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.

Originele taal-2	Engels
Titel	Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA
Redacteuren	M.D. Rosetti, R.R. Hill, A. Johansson, A Dunkin, R.G. Ingalls
Plaats van productie	United States, Austin, Texas
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	1610-1621
DOI's	https://doi.org/10.1109/WSC.2009.5429268
Status	Gepubliceerd - 2009

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Veeger, C. P. L., Etman, L. F. P., Rooda, J. E., & van Herk, J. (2009). Cycle time distributions of semiconductor workstations using aggregate modeling. In M. D. Rosetti, R. R. Hill, A. Johansson, A. Dunkin, & R. G. Ingalls (editors), Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA (blz. 1610-1621). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/WSC.2009.5429268

Veeger, C.P.L. ; Etman, L.F.P. ; Rooda, J.E. et al. / Cycle time distributions of semiconductor workstations using aggregate modeling. Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. redacteur / M.D. Rosetti ; R.R. Hill ; A. Johansson ; A Dunkin ; R.G. Ingalls. United States, Austin, Texas : Institute of Electrical and Electronics Engineers, 2009. blz. 1610-1621

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title = "Cycle time distributions of semiconductor workstations using aggregate modeling",

abstract = "Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.",

author = "C.P.L. Veeger and L.F.P. Etman and J.E. Rooda and {van Herk}, J.",

year = "2009",

doi = "10.1109/WSC.2009.5429268",

language = "English",

pages = "1610--1621",

editor = "M.D. Rosetti and R.R. Hill and A. Johansson and A Dunkin and R.G. Ingalls",

booktitle = "Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA",

publisher = "Institute of Electrical and Electronics Engineers",

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Veeger, CPL, Etman, LFP, Rooda, JE & van Herk, J 2009, Cycle time distributions of semiconductor workstations using aggregate modeling. in MD Rosetti, RR Hill, A Johansson, A Dunkin & RG Ingalls (uitgave), Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. Institute of Electrical and Electronics Engineers, United States, Austin, Texas, blz. 1610-1621. https://doi.org/10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling. / Veeger, C.P.L.; Etman, L.F.P.; Rooda, J.E. et al.
Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. uitgave / M.D. Rosetti; R.R. Hill; A. Johansson; A Dunkin; R.G. Ingalls. United States, Austin, Texas: Institute of Electrical and Electronics Engineers, 2009. blz. 1610-1621.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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AU - van Herk, J.

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N2 - Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.

AB - Recently an aggregate modeling method has been developed to predict cycle time distributions as a function of throughput for manufacturing workstations with dispatching. The aggregate model is a single-server representation of the workstation with a workload-dependent process time distribution, and a workload-dependent overtaking distribution. The process time and overtaking distribution can be determined from arrival and departure events measured from the workstation at the factory floor. In this paper, we validate the proposed method in the context of semiconductor manufacturing. In particular weconsider a lithography workstation. First, we present a simulation case that demonstrates the accuracy of the aggregate model to predict cycle time distributions. Second, we apply the aggregate modeling method to a case from semiconductor industry,and illustrate how the method performs using arrival and departure data obtained from the manufacturing execution system.

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Veeger CPL, Etman LFP, Rooda JE, van Herk J. Cycle time distributions of semiconductor workstations using aggregate modeling. In Rosetti MD, Hill RR, Johansson A, Dunkin A, Ingalls RG, redacteurs, Proceedings of the 2009 Winter Simulation Conference (WSC 2009), 13-16 December 2009, Austin, Texas, USA. United States, Austin, Texas: Institute of Electrical and Electronics Engineers. 2009. blz. 1610-1621 doi: 10.1109/WSC.2009.5429268

Cycle time distributions of semiconductor workstations using aggregate modeling

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