Cycle time and throughput performance analysis of a litho cell using an aggregate modelling approach

A.A.A. Kock, C.P.L. Veeger, L.F.P. Etman, B. Lemmen, J.E. Rooda

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Originele taal-2	Engels
Titel	Advanced Semiconductor Manufacturing Conference 2007
Plaats van productie	Italy, Streza
Pagina's	???-
Status	Gepubliceerd - 2007

Citeer dit

@inproceedings{d78239e9697f4aecae750ba30ddadc43,

title = "Cycle time and throughput performance analysis of a litho cell using an aggregate modelling approach",

author = "A.A.A. Kock and C.P.L. Veeger and L.F.P. Etman and B. Lemmen and J.E. Rooda",

year = "2007",

language = "English",

pages = "???--",

booktitle = "Advanced Semiconductor Manufacturing Conference 2007",

}