@inproceedings{4b2c1c7de4da4f1faea20b67f5f1fec3,
title = "Crystallization study by transmission electron microscopy of SrTiO3 thin films prepared by plasma-assisted ALD",
abstract = "No abstract.",
author = "V. Longo and F. Roozeboom and W.M.M. Kessels and M.A. Verheijen",
year = "2012",
doi = "10.1149/05013.0069ecst",
language = "English",
series = "ECS Transactions",
pages = "69--77",
booktitle = "Pacific RIM meeting on electrochemical and solid-state science, (PRIME), October 7-12 2012, Honolulu Hawaii",
}