Continuum modeling of particle redeposition during ion-beam erosion. One-dimensional case

C. Diddens, S.J. Linz

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Samenvatting

We present a detailed analysis of a laterally one-dimensional continuum model for target particle redeposition during ion-beam erosion under normal incidence. We show that the redeposition mechanism can be approximated by a Taylor expansion around the mean surface height and clarify the impact of redeposition on nano-scale patterning. Most importantly, we show that stable well-ordered periodic patterns can result in a common Kuramoto-Sivashinsky-like continuum model for ion-beam erosion in cooperation with the model for particle redeposition and identify parameter ranges where they appear. Supplementary material in the form of one mp4 file available from the Journal web page at http://dx.doi.org/10.1140/epjb/e2013-40555-7
Originele taal-2Engels
Pagina's (van-tot)397
Aantal pagina's13
TijdschriftEuropean Physical Journal B : Condensed Matter and Complex Systems
Volume86
Nummer van het tijdschrift9
DOI's
StatusGepubliceerd - 1 sep 2013
Extern gepubliceerdJa

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