Constrained iterative feedback tuning for robust control of a wafer stage system

M.F. Heertjes, B.J.C.H. Velden, van der, T.A.E. Oomen

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

45 Citaten (Scopus)
239 Downloads (Pure)


Iterative feedback tuning (IFT) enables the data-driven tuning of controller parameters without the explicit need for a parametric model. It is known, however, that IFT can lead to nonrobust solutions. The aim of this paper is to develop an IFT approach with robustness constraints. A constrained IFT problem is formulated that is solved by introducing a penalty function. Essentially, the gradient estimates decompose into: 1) the well-known IFT gradients and 2) the gradients with respect to this penalty function. The latter are obtained through a nonparametric model of the controlled system. This guarantees robust stability while only requiring a nonparametric model. The experimental results obtained from the motion control systems of an industrial wafer scanner confirm enhanced performance with guaranteed robustness estimates.
Originele taal-2Engels
Pagina's (van-tot)56-66
Aantal pagina's11
TijdschriftIEEE Transactions on Control Systems Technology
Nummer van het tijdschrift1
StatusGepubliceerd - 1 jan 2016

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