Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model complexity and fidelity to control the flexible dynamical behavior. The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage. Hereto, new connections between system identification and robust control are employed. The experimental results confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
Oomen, T. A. E., Herpen, van, R. M. A., Quist, S. J., Wal, van de, M. M. J., Bosgra, O. H., & Steinbuch, M. (2014). Connecting system identification and robust control for next-generation motion control of a wafer stage. IEEE Transactions on Control Systems Technology, 22(1), 102-118. https://doi.org/10.1109/TCST.2013.2245668