Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage

N.F.M. Mooren, R.J. Voorhoeve, N.J. Dirkx, Tom Oomen

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Originele taal-2Engels
TitelProceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018)
Plaats van productieTokyo, Japan
Pagina's1-2
StatusGepubliceerd - 2018
EvenementIEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization - Tokyo Denki University, Tokyo, Japan
Duur: 6 mrt 20188 mrt 2018
Congresnummer: 4
http://www2.iee.or.jp/~diic/samcon/

Congres

CongresIEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization
Verkorte titelSAMCON 2018
LandJapan
StadTokyo
Periode6/03/188/03/18
Internet adres

Citeer dit

Mooren, N. F. M., Voorhoeve, R. J., Dirkx, N. J., & Oomen, T. (2018). Compensating quasi-static disturbances for inferential control: an observer-based approach applied to a wafer stage. In Proceedings of the IEEEJ International Workshop on Sensing, Actuation, Motion Control, and Optimization (SAMCON 2018) (blz. 1-2). [V2-4].