Coatings, and methods and devices for the manufacture thereof

G.R. Alcott (Uitvinder), J.L. Linden (Uitvinder), M. Creatore (Uitvinder), M.C.M. Sanden, van de (Uitvinder)

Onderzoeksoutput: OctrooiOctrooi-publicatie

Uittreksel

The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.
Originele taal-2Engels
OctrooinummerEP1586674
StatusGepubliceerd - 19 okt 2005

Vingerafdruk

coatings
inventions
vapor phases
nanoparticles

Citeer dit

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abstract = "The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.",
author = "G.R. Alcott and J.L. Linden and M. Creatore and {Sanden, van de}, M.C.M.",
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type = "Patent",
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Coatings, and methods and devices for the manufacture thereof. / Alcott, G.R. (Uitvinder); Linden, J.L. (Uitvinder); Creatore, M. (Uitvinder); Sanden, van de, M.C.M. (Uitvinder).

Octrooi Nr.: EP1586674.

Onderzoeksoutput: OctrooiOctrooi-publicatie

TY - PAT

T1 - Coatings, and methods and devices for the manufacture thereof

AU - Alcott, G.R.

AU - Linden, J.L.

AU - Creatore, M.

AU - Sanden, van de, M.C.M.

PY - 2005/10/19

Y1 - 2005/10/19

N2 - The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.

AB - The present invention describes a method for manufg. a low dielec. const. coating, which coating comprises an inorg. and an org. component, wherein precursors for these components are activated in at least two plasma sources for plasma activated deposition of a chem. vapor phase and wherein said activated precursors are combined before they are deposited from the chem. vapor phase on the substrate to form the coating, characterized in that said inorg. component comprises porous nanoparticles. The invention also describes a device for the manuf. of a low dielec. const. coating.

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M3 - Patent publication

M1 - EP1586674

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