CN radical excitation during CNx thin film deposition by RF generated plasma beam

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

CN radical excitation during CNx thin film deposition by RF generated plasma beam

G. Dinescu
, E. Aldea
, P. Boieriu
, G. Musa
, R.J. Severens
, M.C.M. Sanden, van de
, D.C. Schram

Plasma & Materials Processing

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

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Originele taal-2	Engels
Titel	ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers
Redacteuren	Lukac, Kslnar, Skalny
Plaats van productie	s.l.
Uitgeverij	European Physical Society (EPS)
Pagina's	345-346
Status	Gepubliceerd - 1996

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Dinescu, G., Aldea, E., Boieriu, P., Musa, G., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). CN radical excitation during CNx thin film deposition by RF generated plasma beam. In Lukac, Kslnar, & Skalny (editors), ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers (blz. 345-346). European Physical Society (EPS).

Dinescu, G. ; Aldea, E. ; Boieriu, P. et al. / CN radical excitation during CNx thin film deposition by RF generated plasma beam. ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . redacteur / Lukac ; Kslnar ; Skalny. s.l. : European Physical Society (EPS), 1996. blz. 345-346

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title = "CN radical excitation during CNx thin film deposition by RF generated plasma beam",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and R.J. Severens and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "345--346",

editor = "Lukac and Kslnar and Skalny",

booktitle = "ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers",

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Dinescu, G, Aldea, E, Boieriu, P, Musa, G, Severens, RJ, Sanden, van de, MCM & Schram, DC 1996, CN radical excitation during CNx thin film deposition by RF generated plasma beam. in Lukac, Kslnar & Skalny (reds.), ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . European Physical Society (EPS), s.l., blz. 345-346.

CN radical excitation during CNx thin film deposition by RF generated plasma beam. / Dinescu, G.; Aldea, E.; Boieriu, P. et al.
ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . reds. / Lukac; Kslnar; Skalny. s.l.: European Physical Society (EPS), 1996. blz. 345-346.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - CN radical excitation during CNx thin film deposition by RF generated plasma beam

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 345

EP - 346

BT - ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers

A2 - Lukac,

A2 - Kslnar,

A2 - Skalny,

PB - European Physical Society (EPS)

CY - s.l.

ER -

Dinescu G, Aldea E, Boieriu P, Musa G, Severens RJ, Sanden, van de MCM et al. CN radical excitation during CNx thin film deposition by RF generated plasma beam. In Lukac, Kslnar, Skalny, redacteurs, ESCAMPIG 13 : 13th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases, Poprad, Slovakia, August 27-30, 1996 : Abstracts of invited lectures and contributed papers . s.l.: European Physical Society (EPS). 1996. blz. 345-346