Clustertool optimization through scheduling rules

B. Lemmen; E.J.J. Campen, van; H. Roede; J.E. Rooda

doi:10.1109/ISSM.1999.808745

Clustertool optimization through scheduling rules

B. Lemmen, E.J.J. Campen, van, H. Roede, J.E. Rooda

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

5 Citaten (Scopus)

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Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

Originele taal-2	Engels
Titel	Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999
Plaats van productie	Piscawatay
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	89-92
ISBN van geprinte versie	0-7803-5403-6
DOI's	https://doi.org/10.1109/ISSM.1999.808745
Status	Gepubliceerd - 1999

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10.1109/ISSM.1999.808745

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@inproceedings{0a65ed70722a4ae6957c3cf8a1cf07fb,

title = "Clustertool optimization through scheduling rules",

abstract = "Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules",

author = "B. Lemmen and {Campen, van}, E.J.J. and H. Roede and J.E. Rooda",

year = "1999",

doi = "10.1109/ISSM.1999.808745",

language = "English",

isbn = "0-7803-5403-6",

pages = "89--92",

booktitle = "Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

}

Clustertool optimization through scheduling rules. / Lemmen, B.; Campen, van, E.J.J.; Roede, H. et al.
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999. Piscawatay: Institute of Electrical and Electronics Engineers, 1999. blz. 89-92.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Clustertool optimization through scheduling rules

AU - Lemmen, B.

AU - Campen, van, E.J.J.

AU - Roede, H.

AU - Rooda, J.E.

PY - 1999

Y1 - 1999

N2 - Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

AB - Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

U2 - 10.1109/ISSM.1999.808745

DO - 10.1109/ISSM.1999.808745

M3 - Conference contribution

SN - 0-7803-5403-6

SP - 89

EP - 92

BT - Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium, October 11-13, 1999, Santa Clara, California, 1999

PB - Institute of Electrical and Electronics Engineers

CY - Piscawatay

ER -

Clustertool optimization through scheduling rules

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