Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

Y.B. Burgt, van de, Y.J. Bellouard, R. Mandamparambil, A.H. Dietzel

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments.
Originele taal-2Engels
TitelLaser-material interactions at micro-nanoscales : 2011 MRS Spring Meeting
Pagina's1-6
DOI's
StatusGepubliceerd - 2011
EvenementLaser-Material Interactions at Micro/Nanoscales, April 26-29, 2011, San Francisco, CA, USA - San Francisco, CA, Verenigde Staten van Amerika
Duur: 26 apr 201129 apr 2011
http://www.mrs.org/s11program-tt/

Publicatie series

NaamMRS Online Proceedings Library
Volume1365
ISSN van geprinte versie1946-4274

Congres

CongresLaser-Material Interactions at Micro/Nanoscales, April 26-29, 2011, San Francisco, CA, USA
LandVerenigde Staten van Amerika
StadSan Francisco, CA
Periode26/04/1129/04/11
Ander2011 MRS Spring Meeting
Internet adres

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  • Citeer dit

    Burgt, van de, Y. B., Bellouard, Y. J., Mandamparambil, R., & Dietzel, A. H. (2011). Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics. In Laser-material interactions at micro-nanoscales : 2011 MRS Spring Meeting (blz. 1-6). (MRS Online Proceedings Library; Vol. 1365). https://doi.org/10.1557/opl.2011.1223