Characterization of nano-porosity in molecular layer deposited films

A. Perrotta, Paul Poodt, Fieke J. van den Bruele, W.M.M. Kessels, M. Creatore

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

4 Citaties (Scopus)

Uittreksel

Molecular layer deposition (MLD) delivers (ultra-) thin organic and hybrid materials, with atomic-level thickness control. However, such layers are often reported to be unstable under ambient conditions, due to the interaction of water and oxygen with the hybrid structure, consequently limiting their applications. In this contribution, we investigate the impact of porosity in MLD layers on their degradation. Alucone layers were deposited by means of trimethylaluminium and ethylene glycol, adopting both temporal and spatial MLD and characterized by means of FT-IR spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The highest growth per cycle (GPC) achieved by spatial MLD resulted in alucone layers with very low stability in ambient air, leading to their conversion to AlOx. Alucones deposited by means of temporal MLD, instead, showed a lower GPC and a higher ambient stability. Ellipsometric porosimetry showed the presence of open nano-porosity in pristine alucone layers. Pores with a diameter in the range of 0.42-2 nm were probed, with a relative content between 1.5% and 5%, respectively, which are attributed to the temporal and spatial MLD layers. We concluded that a correlation exists between the process GPC, the open-porosity relative content, and the degradation of alucone layers.

Originele taal-2Engels
Pagina's (van-tot)7649-7655
Aantal pagina's7
TijdschriftDalton Transactions
Volume47
Nummer van het tijdschrift23
DOI's
StatusGepubliceerd - 1 mei 2018

Vingerafdruk

Porosity
Thickness control
Degradation
Ethylene Glycol
Spectroscopic ellipsometry
Level control
Hybrid materials
Infrared spectroscopy
Oxygen
Water
Air

Citeer dit

Perrotta, A. ; Poodt, Paul ; van den Bruele, Fieke J. ; Kessels, W.M.M. ; Creatore, M. / Characterization of nano-porosity in molecular layer deposited films. In: Dalton Transactions. 2018 ; Vol. 47, Nr. 23. blz. 7649-7655.
@article{e7a388ad51214e6cb177e0e834d6b1db,
title = "Characterization of nano-porosity in molecular layer deposited films",
abstract = "Molecular layer deposition (MLD) delivers (ultra-) thin organic and hybrid materials, with atomic-level thickness control. However, such layers are often reported to be unstable under ambient conditions, due to the interaction of water and oxygen with the hybrid structure, consequently limiting their applications. In this contribution, we investigate the impact of porosity in MLD layers on their degradation. Alucone layers were deposited by means of trimethylaluminium and ethylene glycol, adopting both temporal and spatial MLD and characterized by means of FT-IR spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The highest growth per cycle (GPC) achieved by spatial MLD resulted in alucone layers with very low stability in ambient air, leading to their conversion to AlOx. Alucones deposited by means of temporal MLD, instead, showed a lower GPC and a higher ambient stability. Ellipsometric porosimetry showed the presence of open nano-porosity in pristine alucone layers. Pores with a diameter in the range of 0.42-2 nm were probed, with a relative content between 1.5{\%} and 5{\%}, respectively, which are attributed to the temporal and spatial MLD layers. We concluded that a correlation exists between the process GPC, the open-porosity relative content, and the degradation of alucone layers.",
author = "A. Perrotta and Paul Poodt and {van den Bruele}, {Fieke J.} and W.M.M. Kessels and M. Creatore",
year = "2018",
month = "5",
day = "1",
doi = "10.1039/C8DT01246F",
language = "English",
volume = "47",
pages = "7649--7655",
journal = "Dalton Transactions",
issn = "1477-9226",
publisher = "Royal Society of Chemistry",
number = "23",

}

Characterization of nano-porosity in molecular layer deposited films. / Perrotta, A.; Poodt, Paul; van den Bruele, Fieke J.; Kessels, W.M.M.; Creatore, M.

In: Dalton Transactions, Vol. 47, Nr. 23, 01.05.2018, blz. 7649-7655.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

TY - JOUR

T1 - Characterization of nano-porosity in molecular layer deposited films

AU - Perrotta, A.

AU - Poodt, Paul

AU - van den Bruele, Fieke J.

AU - Kessels, W.M.M.

AU - Creatore, M.

PY - 2018/5/1

Y1 - 2018/5/1

N2 - Molecular layer deposition (MLD) delivers (ultra-) thin organic and hybrid materials, with atomic-level thickness control. However, such layers are often reported to be unstable under ambient conditions, due to the interaction of water and oxygen with the hybrid structure, consequently limiting their applications. In this contribution, we investigate the impact of porosity in MLD layers on their degradation. Alucone layers were deposited by means of trimethylaluminium and ethylene glycol, adopting both temporal and spatial MLD and characterized by means of FT-IR spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The highest growth per cycle (GPC) achieved by spatial MLD resulted in alucone layers with very low stability in ambient air, leading to their conversion to AlOx. Alucones deposited by means of temporal MLD, instead, showed a lower GPC and a higher ambient stability. Ellipsometric porosimetry showed the presence of open nano-porosity in pristine alucone layers. Pores with a diameter in the range of 0.42-2 nm were probed, with a relative content between 1.5% and 5%, respectively, which are attributed to the temporal and spatial MLD layers. We concluded that a correlation exists between the process GPC, the open-porosity relative content, and the degradation of alucone layers.

AB - Molecular layer deposition (MLD) delivers (ultra-) thin organic and hybrid materials, with atomic-level thickness control. However, such layers are often reported to be unstable under ambient conditions, due to the interaction of water and oxygen with the hybrid structure, consequently limiting their applications. In this contribution, we investigate the impact of porosity in MLD layers on their degradation. Alucone layers were deposited by means of trimethylaluminium and ethylene glycol, adopting both temporal and spatial MLD and characterized by means of FT-IR spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The highest growth per cycle (GPC) achieved by spatial MLD resulted in alucone layers with very low stability in ambient air, leading to their conversion to AlOx. Alucones deposited by means of temporal MLD, instead, showed a lower GPC and a higher ambient stability. Ellipsometric porosimetry showed the presence of open nano-porosity in pristine alucone layers. Pores with a diameter in the range of 0.42-2 nm were probed, with a relative content between 1.5% and 5%, respectively, which are attributed to the temporal and spatial MLD layers. We concluded that a correlation exists between the process GPC, the open-porosity relative content, and the degradation of alucone layers.

UR - http://www.scopus.com/inward/record.url?scp=85048441800&partnerID=8YFLogxK

U2 - 10.1039/C8DT01246F

DO - 10.1039/C8DT01246F

M3 - Article

C2 - 29796504

AN - SCOPUS:85048441800

VL - 47

SP - 7649

EP - 7655

JO - Dalton Transactions

JF - Dalton Transactions

SN - 1477-9226

IS - 23

ER -