Characterization of measurement effects in an MST based nano probe

E.J.C. Bos, F.L.M. Delbressine, A.M. Dietzel

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

3 Citaten (Scopus)
4 Downloads (Pure)

Samenvatting

A tactile probe has been designed at the Eindhoven University of Technology to measure a translation of its tip with a 3D uncertainty of 20 nm or better. The suspension of this probe and the electrical connections are manufactured in a series of etching and deposition steps and can be considered to be a Micro Electro-Mechanical System (MEMS). It will be shown that hysteresis effects can have a dominant influence on the probe measurement uncertainty. Several sources of hysteresis within the probe system are investigated experimentally.

Originele taal-2Engels
TitelEUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
RedacteurenF. Chevrier
Pagina's349-352
Aantal pagina's4
StatusGepubliceerd - 1 jan 2005
Evenement5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, Frankrijk
Duur: 8 mei 200511 mei 2005

Congres

Congres5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
LandFrankrijk
StadMontpellier
Periode8/05/0511/05/05

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