Characterisation of a high intensity hydrogen plasma for materials processing

G.J.H. Brussaard; G.J. Brinkman; P. Ven, van de; M.C.M. Sanden, van de; J.J.A.M. Mullen, van der; D.C. Schram

Characterisation of a high intensity hydrogen plasma for materials processing

G.J.H. Brussaard
, G.J. Brinkman
, P. Ven, van de
, M.C.M. Sanden, van de
, J.J.A.M. Mullen, van der
, D.C. Schram

Plasma & Materials Processing

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

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Originele taal-2	Engels
Titel	AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts
Pagina's	144
Status	Gepubliceerd - 1996

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title = "Characterisation of a high intensity hydrogen plasma for materials processing",

author = "G.J.H. Brussaard and G.J. Brinkman and \{Ven, van de\}, P. and \{Sanden, van de\}, M.C.M. and \{Mullen, van der\}, J.J.A.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "144",

booktitle = "AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts",

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TY - GEN

T1 - Characterisation of a high intensity hydrogen plasma for materials processing

AU - Brussaard, G.J.H.

AU - Brinkman, G.J.

AU - Ven, van de, P.

AU - Sanden, van de, M.C.M.

AU - Mullen, van der, J.J.A.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 144

BT - AVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts

ER -