Cavity ring down spectroscopy as a probe for radicals during a-C:H deposition

K.G.Y. Letourneur, M.C.M. Sanden, van de, M.G.H. Boogaarts, R.A.H. Engeln, D.C. Schram

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

Originele taal-2Engels
TitelLaser-aided plasma diagnostics : proceedings of the 9th International symposium, Lake Tahoe, California, 26 September - 1 October 1999Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September - 1 October 1999
Pagina's211-216
StatusGepubliceerd - 1999
Evenement9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA - Lake Tahoe, CA, Verenigde Staten van Amerika
Duur: 26 sep. 19991 okt. 1999

Congres

Congres9th International Symposium on Laser-Aided Plasma Diagnostics (LAPD9), September 26-October 1, 1999, Lake Tahoe, CA, USA
Verkorte titelLAPD9
Land/RegioVerenigde Staten van Amerika
StadLake Tahoe, CA
Periode26/09/991/10/99
AnderInternational Symposium on Laser-Aided Plasma Diagnostics, LAPD 9, Lake Tahoe

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