Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition

K.G.Y. Letourneur; R.A.H. Engeln; M.G.H. Boogaarts; M.C.M. Sanden, van de; D.C. Schram

Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition

K.G.Y. Letourneur, R.A.H. Engeln, M.G.H. Boogaarts, M.C.M. Sanden, van de, D.C. Schram

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

Originele taal-2	Engels
Titel	Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France
Plaats van productie	Paris
Uitgeverij	Société Française du Vide
Pagina's	12-15
Status	Gepubliceerd - 1999
Evenement	CIP '99 : International Colloquium on Plasma Processes ; 12 - Juan-les-Pins Duur: 6 jun. 1999 → 10 jun. 1999

Publicatie series

Naam	Vide: Science, Technique et Applications
Volume	291
ISSN van geprinte versie	1266-0167

Congres

Congres	CIP '99 : International Colloquium on Plasma Processes ; 12
Stad	Juan-les-Pins
Periode	6/06/99 → 10/06/99
Ander

Citeer dit

Letourneur, K. G. Y., Engeln, R. A. H., Boogaarts, M. G. H., Sanden, van de, M. C. M., & Schram, D. C. (1999). Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. In Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France (blz. 12-15). (Vide: Science, Technique et Applications; Vol. 291). Société Française du Vide.

Letourneur, K.G.Y. ; Engeln, R.A.H. ; Boogaarts, M.G.H. ; Sanden, van de, M.C.M. ; Schram, D.C. / Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris : Société Française du Vide, 1999. blz. 12-15 (Vide: Science, Technique et Applications).

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booktitle = "Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France",

note = "CIP '99 : International Colloquium on Plasma Processes ; 12 ; Conference date: 06-06-1999 Through 10-06-1999",

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Letourneur, KGY, Engeln, RAH, Boogaarts, MGH, Sanden, van de, MCM & Schram, DC 1999, Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. in Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Vide: Science, Technique et Applications, vol. 291, Société Française du Vide, Paris, blz. 12-15, CIP '99 : International Colloquium on Plasma Processes ; 12, Juan-les-Pins, 6/06/99.

Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. / Letourneur, K.G.Y.; Engeln, R.A.H.; Boogaarts, M.G.H.; Sanden, van de, M.C.M.; Schram, D.C.

Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris : Société Française du Vide, 1999. blz. 12-15 (Vide: Science, Technique et Applications; Vol. 291).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition

AU - Letourneur, K.G.Y.

AU - Engeln, R.A.H.

AU - Boogaarts, M.G.H.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1999

Y1 - 1999

M3 - Conference contribution

T3 - Vide: Science, Technique et Applications

SP - 12

EP - 15

BT - Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France

PB - Société Française du Vide

CY - Paris

T2 - CIP '99 : International Colloquium on Plasma Processes ; 12

Y2 - 6 June 1999 through 10 June 1999

ER -

Letourneur KGY, Engeln RAH, Boogaarts MGH, Sanden, van de MCM , Schram DC. Cavity ring down spectroscopy as a probe for hydrocarbon radicals during a-C:H deposition. In Proceedings of the CIP '99, 12th International Colloquium on Plasma Processes : June 6 - 10, 1999, Antibes - Juan-les-Pins, France. Paris: Société Française du Vide. 1999. blz. 12-15. (Vide: Science, Technique et Applications).