CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

R.R.H. Schiffelers; C. Huët, van; N. Gidalov; W. Alberts; J.P.M. Voeten; B.D. Theelen; J. Ven; W. Tabingh Suermondt

CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

R.R.H. Schiffelers, C. Huët, van, N. Gidalov, W. Alberts, J.P.M. Voeten, B.D. Theelen, J. Ven, W. Tabingh Suermondt

Onderzoeksoutput: Bijdrage aan congres › Poster › Academic

Originele taal-2	Engels
Status	Gepubliceerd - 2012
Evenement	conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21 - Duur: 21 jun. 2012 → 21 jun. 2012

Congres

Congres	conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21
Periode	21/06/12 → 21/06/12
Ander	13th ASML Technology Conference

Bibliografische nota

Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

Citeer dit

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CARM 2G : model based design, analysis and initialization of Twinscan servo controllers. / Schiffelers, R.R.H.; Huët, van, C.; Gidalov, N.; Alberts, W.; Voeten, J.P.M.; Theelen, B.D.; Ven, J.; Tabingh Suermondt, W.

2012. Postersessie gepresenteerd op conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21.

Onderzoeksoutput: Bijdrage aan congres › Poster › Academic

TY - CONF

T1 - CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

AU - Schiffelers, R.R.H.

AU - Huët, van, C.

AU - Gidalov, N.

AU - Alberts, W.

AU - Voeten, J.P.M.

AU - Theelen, B.D.

AU - Ven, J.

AU - Tabingh Suermondt, W.

N1 - Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

PY - 2012

Y1 - 2012

M3 - Poster

T2 - conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21

Y2 - 21 June 2012 through 21 June 2012

ER -