CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

R.R.H. Schiffelers, C. Huët, van, N. Gidalov, W. Alberts, J.P.M. Voeten, B.D. Theelen, J. Ven, W. Tabingh Suermondt

Onderzoeksoutput: Bijdrage aan congresPosterAcademic

Originele taal-2Engels
StatusGepubliceerd - 2012
Evenementconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21 -
Duur: 21 jun. 201221 jun. 2012

Congres

Congresconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21
Periode21/06/1221/06/12
Ander13th ASML Technology Conference

Bibliografische nota

Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

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