Atomic layer deposition of ruthenium films : properties and surface reactions

N. Leick-Marius

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Applied Physics and Science Education
Begeleider(s)/adviseur	Kessels, W.M.M. (Erwin), Promotor Roozeboom, Fred, Promotor
Datum van toekenning	3 dec. 2014
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-94-6295-003-0
DOI's	https://doi.org/10.6100/IR782932
Status	Gepubliceerd - 2014

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title = "Atomic layer deposition of ruthenium films : properties and surface reactions",

author = "N. Leick-Marius",

year = "2014",

doi = "10.6100/IR782932",

language = "English",

isbn = "978-94-6295-003-0",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}