Samenvatting
Using direct-write atom lithography, Fe nanolines are deposited with a pitch of 186 nm, a full width at half maximum (FWHM) of 50 nm, and a height of up to 6 nm. These values are achieved by relying on geometrical collimation of the atomic beam, thus without using laser collimation techniques. This opens the way for applying direct-write atom lithography to a wide variety of elements.
Originele taal-2 | Engels |
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Pagina's (van-tot) | 697-705 |
Aantal pagina's | 9 |
Tijdschrift | Applied Physics B: Lasers and Optics |
Volume | 98 |
Nummer van het tijdschrift | 4 |
DOI's | |
Status | Gepubliceerd - 2010 |