Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Bart Koolmees; J.P.M.B. (Hans) Vermeulen

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Bart Koolmees (Uitvinder), J.P.M.B. (Hans) Vermeulen (Uitvinder)

Control Systems Technology

Onderzoeksoutput: Octrooi › Octrooi-publicatie

87 Downloads (Pure)

Samenvatting

The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

Originele taal-2	Engels
Octrooinummer	WO2019233698
IPC	G03F 7/20 (2006.01) ,H02K 3/24 (2006.01)
Prioriteitsdatum	5/06/18
Indieningsdatum	9/05/19
Status	Gepubliceerd - 12 dec. 2019

Toegang tot document

WO2019233698A1Definitieve gepubliceerde versie, 1,96 MB

https://nl.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=nl_NL&FT=D&date=20191212&CC=WO&NR=2019233698A1&KC=A1

2 Conferentiebijdrage
1 Octrooi-publicatie

Positioning device, magnetic support system and lithographic apparatus
Koolmees, B. (Uitvinder) & Vermeulen, J. P. M. B. (Uitvinder), 18 apr. 2019, IPC-nummer G03F 7/20 (2006.01) , H01L 21/68 (2006.01) , H01F 6/04 (2006.01) , H02K 55/00 (2006.01) , F17C 13/08 (2006.01) , Octrooi Nr. WO2019072529, 24 sep. 2018, Prioriteitsdatum 11 okt. 2017
Onderzoeksoutput: Octrooi › Octrooi-publicatie

Open Access
Bestand
High stiffness fixation and thermal insulation in a superconducting planar motor
Koolmees, H. B. & Vermeulen, J. P. M. B., 1 jan. 2018, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. Riemer, O., Savio, E., Billington, D., Leach, R. K. & Phillips, D. (uitgave). European Society for Precision Engineering and Nanotechnology, blz. 191-192 2 blz.
Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
The performance potential of superconducting linear and planar motors
Koolmees, H. B., De Bruyn, B. J. H., Vermeulen, J. P. M. B., Jansen, J. W. & Lomonova, E. A., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. Billington, D. & Philips, D. (uitgave). European Society for Precision Engineering and Nanotechnology, blz. 465-466 2 blz.
Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Citeer dit

@misc{b9d3419c1c3b4d0ab6b164f8ba01b498,

title = "Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly",

abstract = "The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.",

author = "Bart Koolmees and Vermeulen, {J.P.M.B. (Hans)}",

year = "2019",

month = dec,

day = "12",

language = "English",

type = "Patent",

note = "WO2019233698; G03F 7/20 (2006.01) ,H02K 3/24 (2006.01) ",

}

TY - PAT

T1 - Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

AU - Koolmees, Bart

AU - Vermeulen, J.P.M.B. (Hans)

PY - 2019/12/12

Y1 - 2019/12/12

N2 - The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

AB - The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

M3 - Patent publication

M1 - WO2019233698

Y2 - 2019/05/09

ER -

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Samenvatting

Toegang tot document

Onderzoekersoutput

Positioning device, magnetic support system and lithographic apparatus

High stiffness fixation and thermal insulation in a superconducting planar motor

The performance potential of superconducting linear and planar motors

Citeer dit