Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

Z. Qing, M.C.M. Sanden, van de, D.K. Otorbaev, M.J. Graaf, de, G.J. Meeusen, A.J.M. Buuron, D.C. Schram

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

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Originele taal-2	Engels
Titel	ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4
Redacteuren	J.E. Harry
Plaats van productie	s.l.
Uitgeverij	International Union of Pure and Applied Chemistry
Pagina's	1374-1379
Status	Gepubliceerd - 1993

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Qing, Z., Sanden, van de, M. C. M., Otorbaev, D. K., Graaf, de, M. J., Meeusen, G. J., Buuron, A. J. M., & Schram, D. C. (1993). Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. In J. E. Harry (editor), ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 (blz. 1374-1379). International Union of Pure and Applied Chemistry.

@inproceedings{a7f8a13ff4bd4042a917219503104917,

title = "Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition",

author = "Z. Qing and {Sanden, van de}, M.C.M. and D.K. Otorbaev and {Graaf, de}, M.J. and G.J. Meeusen and A.J.M. Buuron and D.C. Schram",

year = "1993",

language = "English",

pages = "1374--1379",

editor = "J.E. Harry",

booktitle = "ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4",

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Qing, Z, Sanden, van de, MCM, Otorbaev, DK, Graaf, de, MJ, Meeusen, GJ, Buuron, AJM & Schram, DC 1993, Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. in JE Harry (redactie), ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . International Union of Pure and Applied Chemistry, s.l., blz. 1374-1379.

Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. / Qing, Z.; Sanden, van de, M.C.M.; Otorbaev, D.K. et al.
ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . redactie / J.E. Harry. s.l.: International Union of Pure and Applied Chemistry, 1993. blz. 1374-1379.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

AU - Qing, Z.

AU - Sanden, van de, M.C.M.

AU - Otorbaev, D.K.

AU - Graaf, de, M.J.

AU - Meeusen, G.J.

AU - Buuron, A.J.M.

AU - Schram, D.C.

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 1374

EP - 1379

BT - ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4

A2 - Harry, J.E.

PB - International Union of Pure and Applied Chemistry

CY - s.l.

ER -

Qing Z, Sanden, van de MCM, Otorbaev DK, Graaf, de MJ, Meeusen GJ, Buuron AJM et al. Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. In Harry JE, redacteur, ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . s.l.: International Union of Pure and Applied Chemistry. 1993. blz. 1374-1379