Application of cell-aware test on an advanced 3nm CMOS technology library

Zhan Gao, Santosh Malagi, Min Chun Hu, Joe Swenton, Rogier Baert, Jos Huisken, Bilal Chehab, Kees Goossens, Erik Jan Marinissen

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

Advanced technology nodes employ a large number of innovations. In addition, they require 'scaling boosters' in the design of standard-cell libraries to be able to offer the scaling benefits in area, performance, and power that we have grown accustomed to. Consequently, sub-10nm standard cells are significantly more complex than their predecessors. Cell-aware test (CAT) explicitly targets cell-internal resistive open and short defects identified through extensive characterization of the library cells. This paper is (to the best of our knowledge) the first to report on the application of CAT library characterization on a sub-10nm technology node. We used Cadence's CAT tool flow on an experimental 114-cell-library in IMEC's 3nm CMOS technology iN5. Despite the increased cell complexity, we show that the CAT flow still works, and that compared with functionally-comparable library cells in a 45nm technology, the number of potential non-equivalent defect locations, cell-level test patterns, and defect coverage did not change drastically.

Originele taal-2Engels
Titel2019 IEEE International Test Conference, ITC 2019
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's6
ISBN van elektronische versie9781728148236
DOI's
StatusGepubliceerd - nov 2019
Evenement2019 IEEE International Test Conference, ITC 2019 - Washington, Verenigde Staten van Amerika
Duur: 9 nov 201915 nov 2019

Congres

Congres2019 IEEE International Test Conference, ITC 2019
LandVerenigde Staten van Amerika
StadWashington
Periode9/11/1915/11/19

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Citeer dit

Gao, Z., Malagi, S., Hu, M. C., Swenton, J., Baert, R., Huisken, J., ... Marinissen, E. J. (2019). Application of cell-aware test on an advanced 3nm CMOS technology library. In 2019 IEEE International Test Conference, ITC 2019 [9000164] Piscataway: Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ITC44170.2019.9000164