@inproceedings{603b71698ad54bf4b4010b6502fbb2c8,
title = "Anelasticity in Al-alloy thin films: a micro-mechanical analysis",
abstract = "Micro-electromechanical systems enable many novel high-tech applications. Aluminum alloy thin films would be electrically favorable, but mechanical reliability forms fundamental challenges. Notably, miniaturization reveals detrimental time-dependent anelasticity in free-standing Al-alloy thin films. Yet, systematic experimental studies are lacking, perhaps due to challenges in microscale testing. To this end, a microbeam bending methodology (with",
author = "J.P.M. Hoefnagels and L.I.J.C. Bergers and M.G.D. Geers",
year = "2014",
doi = "10.1007/978-3-319-06977-7_14",
language = "English",
isbn = "978-3-319-06976-0",
series = "Conference proceedings of the Society for Experimental Mechanics series",
publisher = "Springer",
pages = "107--112",
editor = "{J. Carrol}, xx and {S. Daly}, xx",
booktitle = "Fracture, Fatigue, Failure and Damage Evolution, Volume 5. Proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics",
address = "Germany",
note = "2014 Annual Conference on Experimental and Applied Mechanics ; Conference date: 02-06-2014 Through 05-06-2014",
}