An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

Marcel Heertjes; Sebastiaan van den Eijnden; Bardia Sharif

doi:10.1109/ICM54990.2023.10102062

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

Marcel Heertjes, Sebastiaan van den Eijnden, Bardia Sharif

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

4 Citaten (Scopus)

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ybrid integrator-gain systems (HIGS) are nonlinear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way
that guarantees sign-equivalence of the integrator’s input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners. Index Terms—hybrid integrator-gain systems, motion systems, nonlinear PID-control, reset control.

Originele taal-2	Engels
Titel	Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023
Uitgeverij	Institute of Electrical and Electronics Engineers
Aantal pagina's	8
ISBN van elektronische versie	978-1-6654-6661-5
DOI's	https://doi.org/10.1109/ICM54990.2023.10102062
Status	Gepubliceerd - 2023
Evenement	2023 IEEE International Conference on Mechatronics, ICM 2023 - Loughborough, Verenigd Koninkrijk Duur: 15 mrt. 2023 → 17 mrt. 2023

Congres

Congres	2023 IEEE International Conference on Mechatronics, ICM 2023
Verkorte titel	ICM 2023
Land/Regio	Verenigd Koninkrijk
Stad	Loughborough
Periode	15/03/23 → 17/03/23

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@inproceedings{4b3e83a1ed714d718f5095486bc2fcdf,

title = "An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners",

abstract = "Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.",

keywords = "hybrid integrator-gain systems, motion systems, nonlinear PID-control, reset control",

author = "Marcel Heertjes and {van den Eijnden}, Sebastiaan and Bardia Sharif",

year = "2023",

doi = "10.1109/ICM54990.2023.10102062",

language = "English",

booktitle = "Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2023 IEEE International Conference on Mechatronics, ICM 2023, ICM 2023 ; Conference date: 15-03-2023 Through 17-03-2023",

}

Heertjes, M , van den Eijnden, S & Sharif, B 2023, An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. in Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023., 10102062, Institute of Electrical and Electronics Engineers, 2023 IEEE International Conference on Mechatronics, ICM 2023, Loughborough, Verenigd Koninkrijk, 15/03/23. https://doi.org/10.1109/ICM54990.2023.10102062

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. / Heertjes, Marcel ; van den Eijnden, Sebastiaan ; Sharif, Bardia.
Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023. Institute of Electrical and Electronics Engineers, 2023. 10102062.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

AU - Heertjes, Marcel

AU - van den Eijnden, Sebastiaan

AU - Sharif, Bardia

PY - 2023

Y1 - 2023

N2 - Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.

AB - Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.

KW - hybrid integrator-gain systems

KW - motion systems

KW - nonlinear PID-control

KW - reset control

UR - http://www.scopus.com/inward/record.url?scp=85158097942&partnerID=8YFLogxK

U2 - 10.1109/ICM54990.2023.10102062

DO - 10.1109/ICM54990.2023.10102062

M3 - Conference contribution

AN - SCOPUS:85158097942

BT - Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023

PB - Institute of Electrical and Electronics Engineers

T2 - 2023 IEEE International Conference on Mechatronics, ICM 2023

Y2 - 15 March 2023 through 17 March 2023

ER -

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

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