An evaporation based digital microflow meter

In this work, we present a digital microflow meter operating in the range 30–250 nl min-1 for water. The principle is based on determining the evaporation rate of the liquid via reading the number of wetted pore array structures in a microfluidic system, through which continuous evaporation takes place. A proof-of-principle device of the digital flow meter was designed, fabricated, and tested. The device was built on foil-based technology. In the proof-of-principle experiments, good agreement was found between set flow rates and the evaporation rates estimated from reading the number of wetted pore structures. The measurement range of the digital flow meter can be tuned and extended in a straightforward manner by changing the pore structure of the device.