An approach to stable inversion of LPTV systems with application to a position-dependent motion system

J. van Zundert, T.A.E. Oomen

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
26 Downloads (Pure)

Samenvatting

Model inversion is essential in many control approaches, including inverse model feedforward and iterative learning control (ILC). The aim of this paper is the development of inversion techniques for linear periodically time-varying (LPTV) systems, possibly multivariable. The proposed method involves stable inversion, where bounded solutions are computed through a two-point boundary value problem. A key aspect herein involves a new dichotomic split for the stable and unstable dynamics, which is nontrivial for general LTV systems. As a special case, well-known stable inversion techniques for LTI systems are recovered. The approach is successfully demonstrated on a position-dependent wafer stage system.

Originele taal-2Engels
Titel2017 American Control Conference (ACC 2017)
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Pagina's4890-4895
Aantal pagina's6
ISBN van elektronische versie978-1-5090-5992-8
ISBN van geprinte versie978-1-5090-4583-9
DOI's
StatusGepubliceerd - mei 2017
Evenement2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, Verenigde Staten van Amerika
Duur: 24 mei 201726 mei 2017
http://acc2017.a2c2.org/

Congres

Congres2017 American Control Conference (ACC 2017)
Verkorte titelACC 2017
LandVerenigde Staten van Amerika
StadSeattle
Periode24/05/1726/05/17
Internet adres

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  • Citeer dit

    van Zundert, J., & Oomen, T. A. E. (2017). An approach to stable inversion of LPTV systems with application to a position-dependent motion system. In 2017 American Control Conference (ACC 2017) (blz. 4890-4895). Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/ACC.2017.7963712