Amorphous hydrogenated carbon films deposited with an expanding thermal plasma

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Originele taal-2	Engels
Titel	AVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program
Pagina's	212
Status	Gepubliceerd - 1995

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@inproceedings{40ffd35fc8934fd08638ed6ba98d4755,

title = "Amorphous hydrogenated carbon films deposited with an expanding thermal plasma",

author = "J.W.A.M. Gielen and P.R.M. Kleuskens and \{Zande, van der\}, M.J. and A.G.M. Kiers and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1995",

language = "English",

pages = "212",

booktitle = "AVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program",

}

TY - GEN

T1 - Amorphous hydrogenated carbon films deposited with an expanding thermal plasma

AU - Gielen, J.W.A.M.

AU - Kleuskens, P.R.M.

AU - Zande, van der, M.J.

AU - Kiers, A.G.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1995

Y1 - 1995

M3 - Conference contribution

SP - 212

BT - AVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program

ER -