All-optical, ultra-high accuracy displacement sensors with detection means

Y.J. Bellouard, A.A. Said, M. Dugan, P. Bado

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

4 Citaten (Scopus)

Samenvatting

This paper reports a novel approach based on femtosecond laser processing to design micro-mechanical sensors such as force and displacement sensors. The basic concept is to combine integrated optics and mechanical functions in a single piece of glass. It differs from previous micro displacement sensor works in that the measured variable is optical rather than electrically based (strain-resistive, piezo-electric, etc.). Furthermore, a single process is used to define both the optical and the mechanical features. This significantly simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes.
Originele taal-2Engels
TitelTechnologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II : 26 - 28 September, Bruges, Belgium
RedacteurenD.H. Titterton, S.M. Kirkpatrick, R. Stoian, R. Appleby, J. Martyn
Plaats van productieBellingham, Wash.
UitgeverijSPIE
Pagina'sp. 258-271
ISBN van geprinte versie0-8194-6011-7
DOI's
StatusGepubliceerd - 2005
Evenementconference; Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II -
Duur: 1 jan 2005 → …

Publicatie series

NaamProceedings of SPIE
Volume5989
ISSN van geprinte versie0277-786X

Congres

Congresconference; Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II
Periode1/01/05 → …
AnderTechnologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II

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