This paper reports a novel approach based on femtosecond laser processing to design micro-mechanical sensors such as force and displacement sensors. The basic concept is to combine integrated optics and mechanical functions in a single piece of glass. It differs from previous micro displacement sensor works in that the measured variable is optical rather than electrically based (strain-resistive, piezo-electric, etc.). Furthermore, a single process is used to define both the optical and the mechanical features. This significantly simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes.
|Naam||Proceedings of SPIE|
|ISSN van geprinte versie||0277-786X|
|Congres||conference; Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II|
|Periode||1/01/05 → …|
|Ander||Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II|