ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

H.C.M. Knoops; M.E. Donders; L. Baggetto; M.C.M. Sanden, van de; R.A.H. Niessen; P.H.L. Notten; W.M.M. Kessels

ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

H.C.M. Knoops, M.E. Donders, L. Baggetto, M.C.M. Sanden, van de, R.A.H. Niessen, P.H.L. Notten, W.M.M. Kessels

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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Originele taal-2	Engels
Titel	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Redacteuren	W.M.M. Kessels, A. Delabie
Plaats van productie	S.n.
Uitgeverij	s.n.
Pagina's	WedA2b-4-
Status	Gepubliceerd - 2008

Citeer dit

Knoops, H. C. M., Donders, M. E., Baggetto, L., Sanden, van de, M. C. M., Niessen, R. A. H., Notten, P. H. L., & Kessels, W. M. M. (2008). ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. In W. M. M. Kessels, & A. Delabie (editors), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (blz. WedA2b-4-). s.n..

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title = "ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier",

author = "H.C.M. Knoops and M.E. Donders and L. Baggetto and {Sanden, van de}, M.C.M. and R.A.H. Niessen and P.H.L. Notten and W.M.M. Kessels",

year = "2008",

language = "English",

pages = "WedA2b--4--",

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Knoops, HCM, Donders, ME, Baggetto, L, Sanden, van de, MCM, Niessen, RAH, Notten, PHL & Kessels, WMM 2008, ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. in WMM Kessels & A Delabie (uitgave), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., blz. WedA2b-4-.

ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. / Knoops, H.C.M.; Donders, M.E.; Baggetto, L. et al.
Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). uitgave / W.M.M. Kessels; A. Delabie. S.n.: s.n., 2008. blz. WedA2b-4-.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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T1 - ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

AU - Knoops, H.C.M.

AU - Donders, M.E.

AU - Baggetto, L.

AU - Sanden, van de, M.C.M.

AU - Niessen, R.A.H.

AU - Notten, P.H.L.

AU - Kessels, W.M.M.

PY - 2008

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BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -