Active contamination control for high-tech equipment and substrates: particle generation

Mohammad Reza Homayoun

Onderzoeksoutput: Scriptie › EngD Thesis

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Originele taal-2	Engels
Begeleider(s)/adviseur	Hoefnagels, Johan P.M., Begeleider van den Broek, Kaspar, Externe begeleider, Externe Persoon
Datum van toekenning	3 okt. 2019
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Status	Gepubliceerd - 23 okt. 2019

PDEng thesis. - Confidential

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@phdthesis{41dd08ee5f93472a9134e9ac090db0b4,

title = "Active contamination control for high-tech equipment and substrates: particle generation",

author = "Homayoun, \{Mohammad Reza\}",

note = "PDEng thesis. - Confidential",

year = "2019",

month = oct,

day = "23",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}