Acceleration-snap feedforward scheme for a motion system with viscoelastic tuned-mass-damper

M.F. Heertjes, M.L.J. van de Ven, R. Kamidi

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)
2 Downloads (Pure)


Bandwidth-limiting flexible modes in motion systems like the stage systems of a wafer scanner can effectively be damped by incorporating a viscoelastic tuned-mass-damper. This allows for an increase of bandwidth. The viscoelastic properties however pose a challenge on the feedforward design and thereby limit the achievable tracking performance. This is because the viscoelastic properties, which cannot be described by the simple addition of an elastic and a viscous element, induce a relaxation effect that prolongs well beyond the moment that inertial forces induced by the setpoint are being applied to the system. To cope with this problem, a tenth-order model fit from measured frequency response data that sufficiently captures the viscoelastic properties is combined with a data-based optimization approach needed to fine-tune a limited set of acceleration-snap feedforward gains. Experimental results from an industrial wafer stage system demonstrate the applicability of the approach.

Originele taal-2Engels
Titel2017 American Control Conference, ACC 2017, 24-26 May 2017, Seattle, Washington
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's6
ISBN van elektronische versie978-1-5090-5992-8
ISBN van geprinte versie978-1-5090-4583-9
StatusGepubliceerd - 29 jun 2017
Evenement2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, Verenigde Staten van Amerika
Duur: 24 mei 201726 mei 2017


Congres2017 American Control Conference (ACC 2017)
Verkorte titelACC 2017
LandVerenigde Staten van Amerika
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