A sputtering hollow cathode discharge : modelling and comparison with experiments

D.B. Mihailova, M. Grozeva, J. Dijk, van, W.J.M. Brok, J.J.A.M. Mullen, van der

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

Originele taal-2Engels
TitelProceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands
StatusGepubliceerd - 2008

Citeer dit

Mihailova, D. B., Grozeva, M., Dijk, van, J., Brok, W. J. M., & Mullen, van der, J. J. A. M. (2008). A sputtering hollow cathode discharge : modelling and comparison with experiments. In Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands