@inproceedings{22d5f820d5a442d8b796895595f70340,
title = "A multi-wafer case study for 3D geometry prediction of FinFET-like structures with top-down SEM imaging",
author = "Tim Houben and Huisman, {Thomas J.} and M. Pisarenco and {van der Sommen}, Fons and {de With}, {Peter H.N.}",
year = "2023",
month = sep,
day = "14",
language = "English",
booktitle = "International Microscopy Congress (IMC20)",
note = "The 20th International Microscopy Congress, IMC20, IMC20 ; Conference date: 10-09-2023 Through 15-09-2023",
}