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A more efficient rigorous coupled-wave analysis algorithm

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Samenvatting

We present a modification of a well-known mathematical model based on the Rigorous Coupled-Wave Analysis (RCWA) that can be used to solve optical diffraction problems on periodic structures (both 1-D and 2-D gratings with approximated layer-structure). The algorithm calculates the reflected and transmitted field which in turn determine the diffraction efficiencies for all reflected and transmitted orders. Results created with a Matlab implementation of the modified RCWA algorithm (MSolver) show excellent overlap with other published and measured data.
Originele taal-2Engels
TitelProgress in Industrial Mathematics at ECMI 2004 (Proceedings 13th European Conference on Mathematics for Industry, Eindhoven, The Netherlands, June 21-25, 2004)
RedacteurenA. Di Bucchianico, R.M.M. Mattheij, M.A. Peletier
Plaats van productieBerlin
UitgeverijSpringer
Pagina's164-168
ISBN van geprinte versie3-540-28073-1
DOI's
StatusGepubliceerd - 2006

Publicatie series

NaamMathematics in Industry
Volume8
ISSN van geprinte versie1612-3956

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