A low-power, ultra-low capacitance BICMOS process applied to a 2 GHz low-noise amplifier

Wim van der Wel, Ronald Koster, Sander C.L. Jansen, Freek W. Ahlrichs, Peter G.M. Baltus, Gideon W. Kant

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1 Citaat (Scopus)

Samenvatting

A BICMOS process is presented that includes an ultra-low capacitance NPN bipolar transistor (PRET) together with conventional 10 GHz single-poly NPN and MOS devices. Isolation is done using shallow (STI) and deep trenches. The mechanism of capacitance reduction by STI is discussed. The PRET concept, with a 0.2 μm-wide emitter is shown to yield record low capacitances (emitter/base: 1.5 fF, collector/base: 1 fF) combined with high-frequency capability (the cut-off frequency is 14 GHz). This concept is demonstrated in a 2 GHz low-noise amplifier. Proper functioning is obtained at a 3 times lower power consumption than previously reported in literature.

Originele taal-2Engels
Artikelnummer535347
Pagina's (van-tot)1539-1546
Aantal pagina's8
TijdschriftIEEE Transactions on Electron Devices
Volume43
Nummer van het tijdschrift9
DOI's
StatusGepubliceerd - 1996
Extern gepubliceerdJa

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