Samenvatting
A BICMOS process is presented that includes an ultra-low capacitance NPN bipolar transistor (PRET) together with conventional 10 GHz single-poly NPN and MOS devices. Isolation is done using shallow (STI) and deep trenches. The mechanism of capacitance reduction by STI is discussed. The PRET concept, with a 0.2 μm-wide emitter is shown to yield record low capacitances (emitter/base: 1.5 fF, collector/base: 1 fF) combined with high-frequency capability (the cut-off frequency is 14 GHz). This concept is demonstrated in a 2 GHz low-noise amplifier. Proper functioning is obtained at a 3 times lower power consumption than previously reported in literature.
Originele taal-2 | Engels |
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Artikelnummer | 535347 |
Pagina's (van-tot) | 1539-1546 |
Aantal pagina's | 8 |
Tijdschrift | IEEE Transactions on Electron Devices |
Volume | 43 |
Nummer van het tijdschrift | 9 |
DOI's | |
Status | Gepubliceerd - 1996 |
Extern gepubliceerd | Ja |