A low-power CMOS integrated sensor for CO2 detection in the percentage range

A. Humbert, B.J. Tuerlings, R.J.O.M. Hoofman, Z. Tan, D.J. Gravesteijn, M.A.P. Pertijs, C.W.M. Bastiaansen, D. Soccol

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

7 Citaten (Scopus)
2 Downloads (Pure)

Samenvatting

Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

Originele taal-2Engels
Titel2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pagina's1649-1652
Aantal pagina's4
DOI's
StatusGepubliceerd - 2013
Evenement2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Centro de Convenciones Internacional de Barcelona, Barcelona, Spanje
Duur: 16 jun. 201320 jun. 2013
http://www.transducers-eurosensors2013.org/

Congres

Congres2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Land/RegioSpanje
StadBarcelona
Periode16/06/1320/06/13
Internet adres

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