A compliance feedforward scheme for a class of LTV motion systems

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
7 Downloads (Pure)


The implementation of lightweight high-performance motion systems in lithography applications imposes among others lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs brings the effect of structural flexibilities to the fore especially when the so-called point of interest is not at a fixed location. This is for example the case when exposing a silicon wafer. To deal with structural flexibilities, a feedforward controller is proposed that combines two concepts: (a) continuous compliance compensation control and (b) snap feedforward control. Expanded to a subclass of LTV motion systems, the resulting controller compensates for the position-dependent and time-varying compliance of a flexible structure. The compliance function used will be derived using partial differential equations (PDE). The method is validated by simulation results.

Originele taal-2Engels
Titel2017 American Control Conference, ACC 2017, 24-26 May 2017, Seattle, Washington
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's6
ISBN van elektronische versie978-1-5090-5992-8
ISBN van geprinte versie978-1-5090-4583-9
StatusGepubliceerd - 29 jun. 2017
Evenement2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, Verenigde Staten van Amerika
Duur: 24 mei 201726 mei 2017


Congres2017 American Control Conference (ACC 2017)
Verkorte titelACC 2017
Land/RegioVerenigde Staten van Amerika
Internet adres


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