A 3D translation stage for metrological AFM

C. Werner

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Mechanical Engineering
Begeleider(s)/adviseur	Steinbuch, Maarten, Promotor Rosielle, Nick, Co-Promotor
Datum van toekenning	16 dec. 2010
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-90-386-2391-7
DOI's	https://doi.org/10.6100/IR692270
Status	Gepubliceerd - 2010

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@phdthesis{5c3e2734a655482d9b14dfe234ed7308,

title = "A 3D translation stage for metrological AFM",

author = "C. Werner",

year = "2010",

doi = "10.6100/IR692270",

language = "English",

isbn = "978-90-386-2391-7",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}