3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries

L. Baggetto, H.C.M. Knoops, R.A.H. Niessen, W.M.M. Kessels, P.H.L. Notten

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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The deposition feasibility and electrochemical evaluation of highly structured negative electrode stacks for 3D-integrated batteries is demonstrated. The stacks comprise a TiN thin film, serving as both current collector and Li-barrier layer, covered by a polycrystalline Si (poly-Si) thin film as electrode material. In comparison with planar films, these poly-Si films present a storage capacity increase of about 5x for the highest pore aspect ratio electrodes. The step coverage of poly-Si can be considerably improved by growing TiN and poly-Si into wide trenches. This results in much smoother poly-Si films and significantly improved step coverage. Further optimization of the trench dimensions should result in poly-Si films with a Li-storage capacity increase of more than one order of magnitude with respect to planar films.
Originele taal-2Engels
Pagina's (van-tot)3703-3708
Aantal pagina's6
TijdschriftJournal of Materials Chemistry
Nummer van het tijdschrift18
StatusGepubliceerd - 2010

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