3D-deflectometry : fast nanotopography measurement for the semiconductor industry

K.K. Szwedowicz

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Applied Physics and Science Education
Begeleider(s)/adviseur	Beijerinck, Herman, Promotor Tijhuis, Anton, Promotor Bäumer, Stefan M.B., Co-Promotor, Externe Persoon
Datum van toekenning	8 nov. 2006
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-90-386-0679-8
DOI's	https://doi.org/10.6100/IR609510
Status	Gepubliceerd - 2006

Toegang tot document

@phdthesis{78bb1e4ce42249d687cf685ce86f9b61,

title = "3D-deflectometry : fast nanotopography measurement for the semiconductor industry",

author = "K.K. Szwedowicz",

year = "2006",

doi = "10.6100/IR609510",

language = "English",

isbn = "978-90-386-0679-8",

publisher = "Technische Universiteit Eindhoven",

school = "Applied Physics and Science Education",

}