TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for nextgeneration lithography and metrology application - ASML project 1: Piezo-electric materials and amplifier electronics for wafer stage applicatoin

  • Lomonova, Elena A. (Project Manager)
  • van der Hagen, Daniëlle (Project communicatie medewerker)

Project: Onderzoek direct

Projectdetails

StatusActief
Effectieve start/einddatum1/01/1831/12/22