Projectdetails
| Status | Actief |
|---|---|
| Effectieve start/einddatum | 1/01/18 → 31/12/22 |
TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for nextgeneration lithography and metrology application - ASML project 1: Piezo-electric materials and amplifier electronics for wafer stage applicatoin
- Lomonova, Elena A. (Project Manager)
- van der Hagen, Daniëlle (Project communicatie medewerker)
Project: Onderzoek direct