Projectdetails
| Status | Actief |
|---|---|
| Effectieve start/einddatum | 1/01/22 → 31/12/27 |
Topsector
- TKI-HTSM
PPS23-2-03576607 MASC CST "Modelling And Shape Control for lithography system applications"
- Oomen, Tom A.E. (Project Manager)
- van der Hulst, Maarten (Projectmedewerker)
Project: Third tier