Projectdetails
| Status | Actief |
|---|---|
| Effectieve start/einddatum | 1/03/20 → 31/12/27 |
Topsector
- TKI-HTSM
PhotoLitho, Aberration compensation andsurface chargin M&CS
- ten Thije Boonkkamp, Jan H.M. (Project Manager)
- Barion, Antonio (Projectmedewerker)
- Verma, Sanjana (Projectmedewerker)
- Anthonissen, Martijn J.H. (Projectmedewerker)
Project: Third tier