TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for next generation lithography and metrology application - ASML project 2: Control architecture and design for a piezo-electric wafer stage

Project: Third tier

Projectdetails

StatusActief
Effectieve start/einddatum1/01/1830/11/25

Topsector

  • TKI-HTSM