Projectdetails
| Status | Actief |
|---|---|
| Effectieve start/einddatum | 1/01/18 → 31/12/22 |
TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for next generation lithography and metrology application - ASML project 2: Control architecture and design for a piezo-electric wafer stage
- Van den Hof, Paul M.J. (Project Manager)
- Bosman Barros, Clarisse (Projectmedewerker)
- Nawijn, Hiltje (Project communicatie medewerker)
Project: Onderzoek direct